8/8/2010	12:04:47 AM	Helium valve opened
8/8/2010	12:04:50 AM	Helium MFC set to  100.000000
8/8/2010	12:05:14 AM	Helium valve closed
8/8/2010	12:05:18 AM	Helium MFC set to  0.000000
8/8/2010	12:05:58 AM	Recipe started at 12:05 AM
8/8/2010	12:05:58 AM	Helium valve closed
8/8/2010	12:05:58 AM	BCl3 valve closed
8/8/2010	12:05:58 AM	PH3 valve closed
8/8/2010	12:05:58 AM	SiCl4 pre valve closed
8/8/2010	12:05:58 AM	SiCl4 post valve closed
8/8/2010	12:05:58 AM	Main Vac valve closed
8/8/2010	12:05:58 AM	Bypass valve closed
8/8/2010	12:05:58 AM	Bubbler valve closed
8/8/2010	12:05:58 AM	H2 valve opened
8/8/2010	12:05:58 AM	Helium MFC set to  0.000000
8/8/2010	12:05:58 AM	H2 MFC set to  500.000000
8/8/2010	12:05:58 AM	BCl3 MFC set to  0.000000
8/8/2010	12:05:58 AM	PHl3 MFC set to  0.000000
8/8/2010	12:05:58 AM	SiCl4 MFC set to  0.000000
8/8/2010	12:05:58 AM	Bypass solenoid MFC set to  0.000000
8/8/2010	12:05:59 AM	Tube furnace set to 0
8/8/2010	12:07:19 AM	Helium valve closed
8/8/2010	12:07:19 AM	BCl3 valve closed
8/8/2010	12:07:19 AM	PH3 valve closed
8/8/2010	12:07:19 AM	SiCl4 pre valve closed
8/8/2010	12:07:19 AM	SiCl4 post valve closed
8/8/2010	12:07:19 AM	Main Vac valve closed
8/8/2010	12:07:19 AM	Bypass valve closed
8/8/2010	12:07:19 AM	H2 valve opened
8/8/2010	12:07:19 AM	Bubbler valve opened
8/8/2010	12:07:19 AM	Helium MFC set to  0.000000
8/8/2010	12:07:19 AM	H2 MFC set to  500.000000
8/8/2010	12:07:19 AM	BCl3 MFC set to  0.000000
8/8/2010	12:07:19 AM	PHl3 MFC set to  0.000000
8/8/2010	12:07:19 AM	SiCl4 MFC set to  0.000000
8/8/2010	12:07:19 AM	Bypass solenoid MFC set to  0.000000
8/8/2010	12:07:19 AM	Tube furnace set to 1000
8/8/2010	12:15:34 AM	Helium valve closed
8/8/2010	12:15:34 AM	PH3 valve closed
8/8/2010	12:15:34 AM	Main Vac valve closed
8/8/2010	12:15:34 AM	Bypass valve closed
8/8/2010	12:15:34 AM	H2 valve opened
8/8/2010	12:15:34 AM	BCl3 valve opened
8/8/2010	12:15:34 AM	SiCl4 pre valve opened
8/8/2010	12:15:34 AM	SiCl4 post valve opened
8/8/2010	12:15:34 AM	Bubbler valve opened
8/8/2010	12:15:34 AM	Helium MFC set to  0.000000
8/8/2010	12:15:34 AM	H2 MFC set to  500.000000
8/8/2010	12:15:34 AM	BCl3 MFC set to  29.000000
8/8/2010	12:15:34 AM	PHl3 MFC set to  0.000000
8/8/2010	12:15:34 AM	SiCl4 MFC set to  50.000000
8/8/2010	12:15:34 AM	Bypass solenoid MFC set to  0.000000
8/8/2010	12:15:35 AM	Tube furnace set to 1000
8/8/2010	12:18:45 AM	Helium valve closed
8/8/2010	12:18:45 AM	PH3 valve closed
8/8/2010	12:18:45 AM	Main Vac valve closed
8/8/2010	12:18:45 AM	Bypass valve closed
8/8/2010	12:18:45 AM	H2 valve opened
8/8/2010	12:18:45 AM	BCl3 valve opened
8/8/2010	12:18:45 AM	SiCl4 pre valve opened
8/8/2010	12:18:45 AM	SiCl4 post valve opened
8/8/2010	12:18:45 AM	Bubbler valve opened
8/8/2010	12:18:45 AM	Helium MFC set to  0.000000
8/8/2010	12:18:45 AM	H2 MFC set to  500.000000
8/8/2010	12:18:45 AM	BCl3 MFC set to  29.000000
8/8/2010	12:18:45 AM	PHl3 MFC set to  0.000000
8/8/2010	12:18:45 AM	SiCl4 MFC set to  50.000000
8/8/2010	12:18:45 AM	Bypass solenoid MFC set to  0.000000
8/8/2010	12:18:45 AM	Tube furnace set to 1000
8/8/2010	12:23:45 AM	H2 valve closed
8/8/2010	12:23:45 AM	BCl3 valve closed
8/8/2010	12:23:45 AM	PH3 valve closed
8/8/2010	12:23:45 AM	SiCl4 pre valve closed
8/8/2010	12:23:45 AM	SiCl4 post valve closed
8/8/2010	12:23:45 AM	Main Vac valve closed
8/8/2010	12:23:45 AM	Bypass valve closed
8/8/2010	12:23:45 AM	Helium valve opened
8/8/2010	12:23:45 AM	Bubbler valve opened
8/8/2010	12:23:45 AM	Helium MFC set to  500.000000
8/8/2010	12:23:45 AM	H2 MFC set to  0.000000
8/8/2010	12:23:45 AM	BCl3 MFC set to  0.000000
8/8/2010	12:23:45 AM	PHl3 MFC set to  0.000000
8/8/2010	12:23:45 AM	SiCl4 MFC set to  0.000000
8/8/2010	12:23:45 AM	Bypass solenoid MFC set to  0.000000
8/8/2010	12:23:45 AM	Tube furnace set to 0
8/8/2010	12:43:45 AM	Helium valve closed
8/8/2010	12:43:45 AM	H2 valve closed
8/8/2010	12:43:45 AM	BCl3 valve closed
8/8/2010	12:43:45 AM	PH3 valve closed
8/8/2010	12:43:45 AM	SiCl4 pre valve closed
8/8/2010	12:43:45 AM	SiCl4 post valve closed
8/8/2010	12:43:45 AM	Main Vac valve closed
8/8/2010	12:43:45 AM	Bypass valve closed
8/8/2010	12:43:45 AM	Bubbler valve closed
8/8/2010	12:43:45 AM	Helium MFC set to  0.000000
8/8/2010	12:43:45 AM	H2 MFC set to  0.000000
8/8/2010	12:43:45 AM	BCl3 MFC set to  0.000000
8/8/2010	12:43:45 AM	PHl3 MFC set to  0.000000
8/8/2010	12:43:45 AM	SiCl4 MFC set to  0.000000
8/8/2010	12:43:45 AM	Bypass solenoid MFC set to  0.000000
8/8/2010	12:43:46 AM	Tube furnace set to 0
8/8/2010	12:43:46 AM	Run finished at 12:43 AM
8/8/2010	1:05:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2010	1:05:12 AM	Recipe started at 1:05 AM
8/8/2010	1:05:12 AM	Helium valve closed
8/8/2010	1:05:12 AM	H2 valve closed
8/8/2010	1:05:12 AM	BCl3 valve closed
8/8/2010	1:05:12 AM	PH3 valve closed
8/8/2010	1:05:12 AM	SiCl4 pre valve closed
8/8/2010	1:05:12 AM	SiCl4 post valve closed
8/8/2010	1:05:12 AM	Main Vac valve closed
8/8/2010	1:05:12 AM	Bubbler valve closed
8/8/2010	1:05:12 AM	Bypass valve opened
8/8/2010	1:05:12 AM	Helium MFC set to  0.000000
8/8/2010	1:05:12 AM	H2 MFC set to  0.000000
8/8/2010	1:05:12 AM	BCl3 MFC set to  0.000000
8/8/2010	1:05:12 AM	PHl3 MFC set to  0.000000
8/8/2010	1:05:12 AM	SiCl4 MFC set to  0.000000
8/8/2010	1:05:12 AM	Bypass solenoid MFC set to  0.000000
8/8/2010	1:05:12 AM	Tube furnace set to 0
8/8/2010	1:05:47 AM	Helium valve closed
8/8/2010	1:05:47 AM	H2 valve closed
8/8/2010	1:05:47 AM	BCl3 valve closed
8/8/2010	1:05:47 AM	PH3 valve closed
8/8/2010	1:05:47 AM	SiCl4 pre valve closed
8/8/2010	1:05:47 AM	SiCl4 post valve closed
8/8/2010	1:05:47 AM	Bubbler valve closed
8/8/2010	1:05:47 AM	Main Vac valve opened
8/8/2010	1:05:47 AM	Bypass valve opened
8/8/2010	1:05:47 AM	Helium MFC set to  0.000000
8/8/2010	1:05:47 AM	H2 MFC set to  0.000000
8/8/2010	1:05:47 AM	BCl3 MFC set to  0.000000
8/8/2010	1:05:47 AM	PHl3 MFC set to  0.000000
8/8/2010	1:05:47 AM	SiCl4 MFC set to  0.000000
8/8/2010	1:05:47 AM	Bypass solenoid MFC set to  0.000000
8/8/2010	1:05:47 AM	Tube furnace set to 0
8/8/2010	1:05:48 AM	Run finished at 1:05 AM
8/8/2010	1:05:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2010	4:43:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2010	4:43:37 PM	Recipe started at 4:43 PM
8/8/2010	4:43:37 PM	H2 valve closed
8/8/2010	4:43:37 PM	BCl3 valve closed
8/8/2010	4:43:37 PM	PH3 valve closed
8/8/2010	4:43:37 PM	SiCl4 pre valve closed
8/8/2010	4:43:37 PM	SiCl4 post valve closed
8/8/2010	4:43:37 PM	Main Vac valve closed
8/8/2010	4:43:37 PM	Bypass valve closed
8/8/2010	4:43:37 PM	Bubbler valve closed
8/8/2010	4:43:37 PM	Helium valve opened
8/8/2010	4:43:37 PM	Helium MFC set to  500.000000
8/8/2010	4:43:37 PM	H2 MFC set to  0.000000
8/8/2010	4:43:37 PM	BCl3 MFC set to  0.000000
8/8/2010	4:43:37 PM	PHl3 MFC set to  0.000000
8/8/2010	4:43:37 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:43:37 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:43:37 PM	Tube furnace set to 0
8/8/2010	4:44:57 PM	Helium valve closed
8/8/2010	4:44:57 PM	H2 valve closed
8/8/2010	4:44:57 PM	BCl3 valve closed
8/8/2010	4:44:57 PM	PH3 valve closed
8/8/2010	4:44:57 PM	SiCl4 pre valve closed
8/8/2010	4:44:57 PM	SiCl4 post valve closed
8/8/2010	4:44:57 PM	Main Vac valve closed
8/8/2010	4:44:57 PM	Bypass valve closed
8/8/2010	4:44:57 PM	Bubbler valve closed
8/8/2010	4:44:57 PM	Helium MFC set to  0.000000
8/8/2010	4:44:57 PM	H2 MFC set to  0.000000
8/8/2010	4:44:57 PM	BCl3 MFC set to  0.000000
8/8/2010	4:44:57 PM	PHl3 MFC set to  0.000000
8/8/2010	4:44:57 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:44:57 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:44:57 PM	Tube furnace set to 0
8/8/2010	4:44:58 PM	Run finished at 4:44 PM
8/8/2010	4:44:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2010	4:53:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2010	4:53:29 PM	Recipe started at 4:53 PM
8/8/2010	4:53:29 PM	Helium valve closed
8/8/2010	4:53:29 PM	H2 valve closed
8/8/2010	4:53:29 PM	BCl3 valve closed
8/8/2010	4:53:29 PM	PH3 valve closed
8/8/2010	4:53:29 PM	SiCl4 pre valve closed
8/8/2010	4:53:29 PM	SiCl4 post valve closed
8/8/2010	4:53:29 PM	Main Vac valve closed
8/8/2010	4:53:29 PM	Bubbler valve closed
8/8/2010	4:53:29 PM	Bypass valve opened
8/8/2010	4:53:29 PM	Helium MFC set to  0.000000
8/8/2010	4:53:29 PM	H2 MFC set to  0.000000
8/8/2010	4:53:29 PM	BCl3 MFC set to  0.000000
8/8/2010	4:53:29 PM	PHl3 MFC set to  0.000000
8/8/2010	4:53:29 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:53:29 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:53:30 PM	Tube furnace set to 0
8/8/2010	4:54:07 PM	Helium valve closed
8/8/2010	4:54:07 PM	H2 valve closed
8/8/2010	4:54:07 PM	BCl3 valve closed
8/8/2010	4:54:07 PM	PH3 valve closed
8/8/2010	4:54:07 PM	SiCl4 pre valve closed
8/8/2010	4:54:07 PM	SiCl4 post valve closed
8/8/2010	4:54:07 PM	Bubbler valve closed
8/8/2010	4:54:07 PM	Main Vac valve opened
8/8/2010	4:54:07 PM	Bypass valve opened
8/8/2010	4:54:07 PM	Helium MFC set to  0.000000
8/8/2010	4:54:07 PM	H2 MFC set to  0.000000
8/8/2010	4:54:07 PM	BCl3 MFC set to  0.000000
8/8/2010	4:54:07 PM	PHl3 MFC set to  0.000000
8/8/2010	4:54:07 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:54:07 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:54:08 PM	Tube furnace set to 0
8/8/2010	4:54:08 PM	Run finished at 4:54 PM
8/8/2010	4:54:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2010	4:55:09 PM	Recipe started at 4:55 PM
8/8/2010	4:55:09 PM	Helium valve closed
8/8/2010	4:55:09 PM	H2 valve closed
8/8/2010	4:55:09 PM	BCl3 valve closed
8/8/2010	4:55:09 PM	PH3 valve closed
8/8/2010	4:55:09 PM	SiCl4 pre valve closed
8/8/2010	4:55:09 PM	SiCl4 post valve closed
8/8/2010	4:55:09 PM	Main Vac valve closed
8/8/2010	4:55:09 PM	Bubbler valve closed
8/8/2010	4:55:09 PM	Bypass valve opened
8/8/2010	4:55:09 PM	Helium MFC set to  0.000000
8/8/2010	4:55:09 PM	H2 MFC set to  0.000000
8/8/2010	4:55:09 PM	BCl3 MFC set to  0.000000
8/8/2010	4:55:09 PM	PHl3 MFC set to  0.000000
8/8/2010	4:55:09 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:55:09 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:55:09 PM	Tube furnace set to 0
8/8/2010	4:55:09 PM	Helium valve closed
8/8/2010	4:55:09 PM	H2 valve closed
8/8/2010	4:55:09 PM	BCl3 valve closed
8/8/2010	4:55:09 PM	PH3 valve closed
8/8/2010	4:55:09 PM	SiCl4 pre valve closed
8/8/2010	4:55:09 PM	SiCl4 post valve closed
8/8/2010	4:55:09 PM	Bubbler valve closed
8/8/2010	4:55:09 PM	Main Vac valve opened
8/8/2010	4:55:09 PM	Bypass valve opened
8/8/2010	4:55:09 PM	Helium MFC set to  0.000000
8/8/2010	4:55:09 PM	H2 MFC set to  0.000000
8/8/2010	4:55:09 PM	BCl3 MFC set to  0.000000
8/8/2010	4:55:09 PM	PHl3 MFC set to  0.000000
8/8/2010	4:55:09 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:55:09 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:55:10 PM	Tube furnace set to 0
8/8/2010	4:56:10 PM	H2 valve closed
8/8/2010	4:56:10 PM	BCl3 valve closed
8/8/2010	4:56:10 PM	PH3 valve closed
8/8/2010	4:56:10 PM	SiCl4 pre valve closed
8/8/2010	4:56:10 PM	SiCl4 post valve closed
8/8/2010	4:56:10 PM	Bubbler valve closed
8/8/2010	4:56:10 PM	Helium valve opened
8/8/2010	4:56:10 PM	Main Vac valve opened
8/8/2010	4:56:10 PM	Bypass valve opened
8/8/2010	4:56:10 PM	Helium MFC set to  100.000000
8/8/2010	4:56:10 PM	H2 MFC set to  0.000000
8/8/2010	4:56:10 PM	BCl3 MFC set to  0.000000
8/8/2010	4:56:10 PM	PHl3 MFC set to  0.000000
8/8/2010	4:56:10 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:56:10 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:56:10 PM	Tube furnace set to 0
8/8/2010	4:59:05 PM	Helium valve closed
8/8/2010	4:59:05 PM	H2 valve closed
8/8/2010	4:59:05 PM	BCl3 valve closed
8/8/2010	4:59:05 PM	PH3 valve closed
8/8/2010	4:59:05 PM	SiCl4 pre valve closed
8/8/2010	4:59:05 PM	SiCl4 post valve closed
8/8/2010	4:59:05 PM	Bubbler valve closed
8/8/2010	4:59:05 PM	Main Vac valve opened
8/8/2010	4:59:05 PM	Bypass valve opened
8/8/2010	4:59:05 PM	Helium MFC set to  0.000000
8/8/2010	4:59:05 PM	H2 MFC set to  0.000000
8/8/2010	4:59:05 PM	BCl3 MFC set to  0.000000
8/8/2010	4:59:05 PM	PHl3 MFC set to  0.000000
8/8/2010	4:59:05 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:59:05 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:59:05 PM	Tube furnace set to 0
8/8/2010	4:59:06 PM	H2 valve closed
8/8/2010	4:59:06 PM	BCl3 valve closed
8/8/2010	4:59:06 PM	PH3 valve closed
8/8/2010	4:59:06 PM	SiCl4 pre valve closed
8/8/2010	4:59:06 PM	SiCl4 post valve closed
8/8/2010	4:59:06 PM	Bubbler valve closed
8/8/2010	4:59:06 PM	Helium valve opened
8/8/2010	4:59:06 PM	Main Vac valve opened
8/8/2010	4:59:06 PM	Bypass valve opened
8/8/2010	4:59:06 PM	Helium MFC set to  100.000000
8/8/2010	4:59:06 PM	H2 MFC set to  0.000000
8/8/2010	4:59:06 PM	BCl3 MFC set to  0.000000
8/8/2010	4:59:06 PM	PHl3 MFC set to  0.000000
8/8/2010	4:59:06 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:59:06 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:59:06 PM	Tube furnace set to 0
8/8/2010	4:59:06 PM	Helium valve closed
8/8/2010	4:59:06 PM	H2 valve closed
8/8/2010	4:59:06 PM	BCl3 valve closed
8/8/2010	4:59:06 PM	PH3 valve closed
8/8/2010	4:59:06 PM	SiCl4 pre valve closed
8/8/2010	4:59:06 PM	SiCl4 post valve closed
8/8/2010	4:59:06 PM	Bubbler valve closed
8/8/2010	4:59:06 PM	Main Vac valve opened
8/8/2010	4:59:06 PM	Bypass valve opened
8/8/2010	4:59:06 PM	Helium MFC set to  0.000000
8/8/2010	4:59:06 PM	H2 MFC set to  0.000000
8/8/2010	4:59:06 PM	BCl3 MFC set to  0.000000
8/8/2010	4:59:06 PM	PHl3 MFC set to  0.000000
8/8/2010	4:59:06 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:59:06 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:59:06 PM	Tube furnace set to 0
8/8/2010	4:59:08 PM	H2 valve closed
8/8/2010	4:59:08 PM	BCl3 valve closed
8/8/2010	4:59:08 PM	PH3 valve closed
8/8/2010	4:59:08 PM	SiCl4 pre valve closed
8/8/2010	4:59:08 PM	SiCl4 post valve closed
8/8/2010	4:59:08 PM	Bubbler valve closed
8/8/2010	4:59:08 PM	Helium valve opened
8/8/2010	4:59:08 PM	Main Vac valve opened
8/8/2010	4:59:08 PM	Bypass valve opened
8/8/2010	4:59:08 PM	Helium MFC set to  100.000000
8/8/2010	4:59:08 PM	H2 MFC set to  0.000000
8/8/2010	4:59:08 PM	BCl3 MFC set to  0.000000
8/8/2010	4:59:08 PM	PHl3 MFC set to  0.000000
8/8/2010	4:59:08 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:59:08 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:59:08 PM	Tube furnace set to 0
8/8/2010	4:59:10 PM	Helium valve closed
8/8/2010	4:59:10 PM	H2 valve closed
8/8/2010	4:59:10 PM	BCl3 valve closed
8/8/2010	4:59:10 PM	PH3 valve closed
8/8/2010	4:59:10 PM	SiCl4 pre valve closed
8/8/2010	4:59:10 PM	SiCl4 post valve closed
8/8/2010	4:59:10 PM	Bubbler valve closed
8/8/2010	4:59:10 PM	Main Vac valve opened
8/8/2010	4:59:10 PM	Bypass valve opened
8/8/2010	4:59:10 PM	Helium MFC set to  0.000000
8/8/2010	4:59:10 PM	H2 MFC set to  0.000000
8/8/2010	4:59:10 PM	BCl3 MFC set to  0.000000
8/8/2010	4:59:10 PM	PHl3 MFC set to  0.000000
8/8/2010	4:59:10 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:59:10 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:59:10 PM	Tube furnace set to 0
8/8/2010	4:59:12 PM	H2 valve closed
8/8/2010	4:59:12 PM	BCl3 valve closed
8/8/2010	4:59:12 PM	PH3 valve closed
8/8/2010	4:59:12 PM	SiCl4 pre valve closed
8/8/2010	4:59:12 PM	SiCl4 post valve closed
8/8/2010	4:59:12 PM	Bubbler valve closed
8/8/2010	4:59:12 PM	Helium valve opened
8/8/2010	4:59:12 PM	Main Vac valve opened
8/8/2010	4:59:12 PM	Bypass valve opened
8/8/2010	4:59:12 PM	Helium MFC set to  100.000000
8/8/2010	4:59:12 PM	H2 MFC set to  0.000000
8/8/2010	4:59:12 PM	BCl3 MFC set to  0.000000
8/8/2010	4:59:12 PM	PHl3 MFC set to  0.000000
8/8/2010	4:59:12 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:59:12 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:59:12 PM	Tube furnace set to 0
8/8/2010	4:59:12 PM	Helium valve closed
8/8/2010	4:59:12 PM	H2 valve closed
8/8/2010	4:59:12 PM	BCl3 valve closed
8/8/2010	4:59:12 PM	PH3 valve closed
8/8/2010	4:59:12 PM	SiCl4 pre valve closed
8/8/2010	4:59:12 PM	SiCl4 post valve closed
8/8/2010	4:59:12 PM	Bubbler valve closed
8/8/2010	4:59:12 PM	Main Vac valve opened
8/8/2010	4:59:12 PM	Bypass valve opened
8/8/2010	4:59:12 PM	Helium MFC set to  0.000000
8/8/2010	4:59:12 PM	H2 MFC set to  0.000000
8/8/2010	4:59:12 PM	BCl3 MFC set to  0.000000
8/8/2010	4:59:12 PM	PHl3 MFC set to  0.000000
8/8/2010	4:59:12 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:59:12 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:59:12 PM	Tube furnace set to 0
8/8/2010	4:59:13 PM	H2 valve closed
8/8/2010	4:59:13 PM	BCl3 valve closed
8/8/2010	4:59:13 PM	PH3 valve closed
8/8/2010	4:59:13 PM	SiCl4 pre valve closed
8/8/2010	4:59:13 PM	SiCl4 post valve closed
8/8/2010	4:59:13 PM	Bubbler valve closed
8/8/2010	4:59:13 PM	Helium valve opened
8/8/2010	4:59:13 PM	Main Vac valve opened
8/8/2010	4:59:13 PM	Bypass valve opened
8/8/2010	4:59:13 PM	Helium MFC set to  100.000000
8/8/2010	4:59:13 PM	H2 MFC set to  0.000000
8/8/2010	4:59:13 PM	BCl3 MFC set to  0.000000
8/8/2010	4:59:13 PM	PHl3 MFC set to  0.000000
8/8/2010	4:59:13 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:59:13 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:59:13 PM	Tube furnace set to 0
8/8/2010	4:59:14 PM	Helium valve closed
8/8/2010	4:59:14 PM	H2 valve closed
8/8/2010	4:59:14 PM	BCl3 valve closed
8/8/2010	4:59:14 PM	PH3 valve closed
8/8/2010	4:59:14 PM	SiCl4 pre valve closed
8/8/2010	4:59:14 PM	SiCl4 post valve closed
8/8/2010	4:59:14 PM	Bubbler valve closed
8/8/2010	4:59:14 PM	Main Vac valve opened
8/8/2010	4:59:14 PM	Bypass valve opened
8/8/2010	4:59:14 PM	Helium MFC set to  0.000000
8/8/2010	4:59:14 PM	H2 MFC set to  0.000000
8/8/2010	4:59:14 PM	BCl3 MFC set to  0.000000
8/8/2010	4:59:14 PM	PHl3 MFC set to  0.000000
8/8/2010	4:59:14 PM	SiCl4 MFC set to  0.000000
8/8/2010	4:59:14 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	4:59:14 PM	Tube furnace set to 0
8/8/2010	4:59:15 PM	Run finished at 4:59 PM
8/8/2010	6:04:51 PM	Recipe started at 6:04 PM
8/8/2010	6:04:51 PM	Helium valve closed
8/8/2010	6:04:51 PM	H2 valve closed
8/8/2010	6:04:51 PM	BCl3 valve closed
8/8/2010	6:04:51 PM	PH3 valve closed
8/8/2010	6:04:51 PM	SiCl4 pre valve closed
8/8/2010	6:04:51 PM	SiCl4 post valve closed
8/8/2010	6:04:51 PM	Main Vac valve closed
8/8/2010	6:04:51 PM	Bubbler valve closed
8/8/2010	6:04:51 PM	Bypass valve opened
8/8/2010	6:04:51 PM	Helium MFC set to  0.000000
8/8/2010	6:04:51 PM	H2 MFC set to  0.000000
8/8/2010	6:04:51 PM	BCl3 MFC set to  0.000000
8/8/2010	6:04:51 PM	PHl3 MFC set to  0.000000
8/8/2010	6:04:51 PM	SiCl4 MFC set to  0.000000
8/8/2010	6:04:51 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	6:04:51 PM	Tube furnace set to 0
8/8/2010	6:04:51 PM	Helium valve closed
8/8/2010	6:04:51 PM	H2 valve closed
8/8/2010	6:04:51 PM	BCl3 valve closed
8/8/2010	6:04:51 PM	PH3 valve closed
8/8/2010	6:04:51 PM	SiCl4 pre valve closed
8/8/2010	6:04:51 PM	SiCl4 post valve closed
8/8/2010	6:04:51 PM	Bubbler valve closed
8/8/2010	6:04:51 PM	Main Vac valve opened
8/8/2010	6:04:51 PM	Bypass valve opened
8/8/2010	6:04:51 PM	Helium MFC set to  0.000000
8/8/2010	6:04:51 PM	H2 MFC set to  0.000000
8/8/2010	6:04:51 PM	BCl3 MFC set to  0.000000
8/8/2010	6:04:51 PM	PHl3 MFC set to  0.000000
8/8/2010	6:04:51 PM	SiCl4 MFC set to  0.000000
8/8/2010	6:04:51 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	6:04:51 PM	Tube furnace set to 0
8/8/2010	6:05:51 PM	H2 valve closed
8/8/2010	6:05:51 PM	BCl3 valve closed
8/8/2010	6:05:51 PM	PH3 valve closed
8/8/2010	6:05:51 PM	SiCl4 pre valve closed
8/8/2010	6:05:51 PM	SiCl4 post valve closed
8/8/2010	6:05:51 PM	Bubbler valve closed
8/8/2010	6:05:51 PM	Helium valve opened
8/8/2010	6:05:51 PM	Main Vac valve opened
8/8/2010	6:05:51 PM	Bypass valve opened
8/8/2010	6:05:51 PM	Helium MFC set to  100.000000
8/8/2010	6:05:51 PM	H2 MFC set to  0.000000
8/8/2010	6:05:51 PM	BCl3 MFC set to  0.000000
8/8/2010	6:05:51 PM	PHl3 MFC set to  0.000000
8/8/2010	6:05:51 PM	SiCl4 MFC set to  0.000000
8/8/2010	6:05:51 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	6:05:52 PM	Tube furnace set to 0
8/8/2010	6:14:52 PM	Helium valve closed
8/8/2010	6:14:52 PM	H2 valve closed
8/8/2010	6:14:52 PM	BCl3 valve closed
8/8/2010	6:14:52 PM	PH3 valve closed
8/8/2010	6:14:52 PM	SiCl4 pre valve closed
8/8/2010	6:14:52 PM	SiCl4 post valve closed
8/8/2010	6:14:52 PM	Bubbler valve closed
8/8/2010	6:14:52 PM	Main Vac valve opened
8/8/2010	6:14:52 PM	Bypass valve opened
8/8/2010	6:14:52 PM	Helium MFC set to  0.000000
8/8/2010	6:14:52 PM	H2 MFC set to  0.000000
8/8/2010	6:14:52 PM	BCl3 MFC set to  0.000000
8/8/2010	6:14:52 PM	PHl3 MFC set to  0.000000
8/8/2010	6:14:52 PM	SiCl4 MFC set to  0.000000
8/8/2010	6:14:52 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	6:14:52 PM	Tube furnace set to 0
8/8/2010	6:15:52 PM	H2 valve closed
8/8/2010	6:15:52 PM	BCl3 valve closed
8/8/2010	6:15:52 PM	PH3 valve closed
8/8/2010	6:15:52 PM	SiCl4 pre valve closed
8/8/2010	6:15:52 PM	SiCl4 post valve closed
8/8/2010	6:15:52 PM	Bubbler valve closed
8/8/2010	6:15:52 PM	Helium valve opened
8/8/2010	6:15:52 PM	Main Vac valve opened
8/8/2010	6:15:52 PM	Bypass valve opened
8/8/2010	6:15:52 PM	Helium MFC set to  100.000000
8/8/2010	6:15:52 PM	H2 MFC set to  0.000000
8/8/2010	6:15:52 PM	BCl3 MFC set to  0.000000
8/8/2010	6:15:52 PM	PHl3 MFC set to  0.000000
8/8/2010	6:15:52 PM	SiCl4 MFC set to  0.000000
8/8/2010	6:15:52 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	6:15:52 PM	Tube furnace set to 0
8/8/2010	6:24:52 PM	Helium valve closed
8/8/2010	6:24:52 PM	H2 valve closed
8/8/2010	6:24:52 PM	BCl3 valve closed
8/8/2010	6:24:52 PM	PH3 valve closed
8/8/2010	6:24:52 PM	SiCl4 pre valve closed
8/8/2010	6:24:52 PM	SiCl4 post valve closed
8/8/2010	6:24:52 PM	Bubbler valve closed
8/8/2010	6:24:52 PM	Main Vac valve opened
8/8/2010	6:24:52 PM	Bypass valve opened
8/8/2010	6:24:52 PM	Helium MFC set to  0.000000
8/8/2010	6:24:52 PM	H2 MFC set to  0.000000
8/8/2010	6:24:52 PM	BCl3 MFC set to  0.000000
8/8/2010	6:24:52 PM	PHl3 MFC set to  0.000000
8/8/2010	6:24:52 PM	SiCl4 MFC set to  0.000000
8/8/2010	6:24:52 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	6:24:52 PM	Tube furnace set to 0
8/8/2010	6:25:52 PM	H2 valve closed
8/8/2010	6:25:52 PM	BCl3 valve closed
8/8/2010	6:25:52 PM	PH3 valve closed
8/8/2010	6:25:52 PM	SiCl4 pre valve closed
8/8/2010	6:25:52 PM	SiCl4 post valve closed
8/8/2010	6:25:52 PM	Bubbler valve closed
8/8/2010	6:25:52 PM	Helium valve opened
8/8/2010	6:25:52 PM	Main Vac valve opened
8/8/2010	6:25:52 PM	Bypass valve opened
8/8/2010	6:25:52 PM	Helium MFC set to  100.000000
8/8/2010	6:25:52 PM	H2 MFC set to  0.000000
8/8/2010	6:25:52 PM	BCl3 MFC set to  0.000000
8/8/2010	6:25:52 PM	PHl3 MFC set to  0.000000
8/8/2010	6:25:52 PM	SiCl4 MFC set to  0.000000
8/8/2010	6:25:52 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	6:25:52 PM	Tube furnace set to 0
8/8/2010	6:34:52 PM	Helium valve closed
8/8/2010	6:34:52 PM	H2 valve closed
8/8/2010	6:34:52 PM	BCl3 valve closed
8/8/2010	6:34:52 PM	PH3 valve closed
8/8/2010	6:34:52 PM	SiCl4 pre valve closed
8/8/2010	6:34:52 PM	SiCl4 post valve closed
8/8/2010	6:34:52 PM	Bubbler valve closed
8/8/2010	6:34:52 PM	Main Vac valve opened
8/8/2010	6:34:52 PM	Bypass valve opened
8/8/2010	6:34:52 PM	Helium MFC set to  0.000000
8/8/2010	6:34:52 PM	H2 MFC set to  0.000000
8/8/2010	6:34:52 PM	BCl3 MFC set to  0.000000
8/8/2010	6:34:52 PM	PHl3 MFC set to  0.000000
8/8/2010	6:34:52 PM	SiCl4 MFC set to  0.000000
8/8/2010	6:34:52 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	6:34:53 PM	Tube furnace set to 0
8/8/2010	6:34:54 PM	Run finished at 6:34 PM
8/8/2010	6:47:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/8/2010	6:47:33 PM	Recipe started at 6:47 PM
8/8/2010	6:47:33 PM	Helium valve closed
8/8/2010	6:47:33 PM	H2 valve closed
8/8/2010	6:47:33 PM	BCl3 valve closed
8/8/2010	6:47:33 PM	PH3 valve closed
8/8/2010	6:47:33 PM	SiCl4 pre valve closed
8/8/2010	6:47:33 PM	SiCl4 post valve closed
8/8/2010	6:47:33 PM	Main Vac valve closed
8/8/2010	6:47:33 PM	Bypass valve closed
8/8/2010	6:47:33 PM	Bubbler valve closed
8/8/2010	6:47:33 PM	Helium MFC set to  0.000000
8/8/2010	6:47:33 PM	H2 MFC set to  0.000000
8/8/2010	6:47:33 PM	BCl3 MFC set to  0.000000
8/8/2010	6:47:33 PM	PHl3 MFC set to  0.000000
8/8/2010	6:47:33 PM	SiCl4 MFC set to  0.000000
8/8/2010	6:47:33 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	6:47:34 PM	Tube furnace set to 0
8/8/2010	6:47:34 PM	Run finished at 6:47 PM
8/8/2010	6:47:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/8/2010	6:47:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2010	6:47:48 PM	Recipe started at 6:47 PM
8/8/2010	6:47:48 PM	Helium valve closed
8/8/2010	6:47:48 PM	H2 valve closed
8/8/2010	6:47:48 PM	BCl3 valve closed
8/8/2010	6:47:48 PM	PH3 valve closed
8/8/2010	6:47:48 PM	SiCl4 pre valve closed
8/8/2010	6:47:48 PM	SiCl4 post valve closed
8/8/2010	6:47:48 PM	Main Vac valve closed
8/8/2010	6:47:48 PM	Bubbler valve closed
8/8/2010	6:47:48 PM	Bypass valve opened
8/8/2010	6:47:48 PM	Helium MFC set to  0.000000
8/8/2010	6:47:48 PM	H2 MFC set to  0.000000
8/8/2010	6:47:48 PM	BCl3 MFC set to  0.000000
8/8/2010	6:47:48 PM	PHl3 MFC set to  0.000000
8/8/2010	6:47:48 PM	SiCl4 MFC set to  0.000000
8/8/2010	6:47:48 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	6:47:48 PM	Tube furnace set to 0
8/8/2010	6:47:48 PM	Helium valve closed
8/8/2010	6:47:48 PM	H2 valve closed
8/8/2010	6:47:48 PM	BCl3 valve closed
8/8/2010	6:47:48 PM	PH3 valve closed
8/8/2010	6:47:48 PM	SiCl4 pre valve closed
8/8/2010	6:47:48 PM	SiCl4 post valve closed
8/8/2010	6:47:48 PM	Bubbler valve closed
8/8/2010	6:47:48 PM	Main Vac valve opened
8/8/2010	6:47:48 PM	Bypass valve opened
8/8/2010	6:47:48 PM	Helium MFC set to  0.000000
8/8/2010	6:47:48 PM	H2 MFC set to  0.000000
8/8/2010	6:47:48 PM	BCl3 MFC set to  0.000000
8/8/2010	6:47:48 PM	PHl3 MFC set to  0.000000
8/8/2010	6:47:48 PM	SiCl4 MFC set to  0.000000
8/8/2010	6:47:48 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	6:47:48 PM	Tube furnace set to 0
8/8/2010	6:47:49 PM	Run finished at 6:47 PM
8/8/2010	6:47:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2010	6:49:26 PM	Recipe started at 6:49 PM
8/8/2010	6:49:26 PM	Helium valve closed
8/8/2010	6:49:26 PM	BCl3 valve closed
8/8/2010	6:49:26 PM	PH3 valve closed
8/8/2010	6:49:26 PM	SiCl4 pre valve closed
8/8/2010	6:49:26 PM	SiCl4 post valve closed
8/8/2010	6:49:26 PM	Main Vac valve closed
8/8/2010	6:49:26 PM	Bypass valve closed
8/8/2010	6:49:26 PM	Bubbler valve closed
8/8/2010	6:49:26 PM	H2 valve opened
8/8/2010	6:49:26 PM	Helium MFC set to  0.000000
8/8/2010	6:49:26 PM	H2 MFC set to  500.000000
8/8/2010	6:49:26 PM	BCl3 MFC set to  0.000000
8/8/2010	6:49:26 PM	PHl3 MFC set to  0.000000
8/8/2010	6:49:26 PM	SiCl4 MFC set to  0.000000
8/8/2010	6:49:26 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	6:49:26 PM	Tube furnace set to 0
8/8/2010	6:50:49 PM	Helium valve closed
8/8/2010	6:50:49 PM	BCl3 valve closed
8/8/2010	6:50:49 PM	PH3 valve closed
8/8/2010	6:50:49 PM	SiCl4 pre valve closed
8/8/2010	6:50:49 PM	SiCl4 post valve closed
8/8/2010	6:50:49 PM	Main Vac valve closed
8/8/2010	6:50:49 PM	Bypass valve closed
8/8/2010	6:50:49 PM	H2 valve opened
8/8/2010	6:50:49 PM	Bubbler valve opened
8/8/2010	6:50:49 PM	Helium MFC set to  0.000000
8/8/2010	6:50:49 PM	H2 MFC set to  500.000000
8/8/2010	6:50:49 PM	BCl3 MFC set to  0.000000
8/8/2010	6:50:49 PM	PHl3 MFC set to  0.000000
8/8/2010	6:50:49 PM	SiCl4 MFC set to  0.000000
8/8/2010	6:50:49 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	6:50:49 PM	Tube furnace set to 1000
8/8/2010	7:10:49 PM	Helium valve closed
8/8/2010	7:10:49 PM	PH3 valve closed
8/8/2010	7:10:49 PM	Main Vac valve closed
8/8/2010	7:10:49 PM	Bypass valve closed
8/8/2010	7:10:49 PM	H2 valve opened
8/8/2010	7:10:49 PM	BCl3 valve opened
8/8/2010	7:10:49 PM	SiCl4 pre valve opened
8/8/2010	7:10:49 PM	SiCl4 post valve opened
8/8/2010	7:10:49 PM	Bubbler valve opened
8/8/2010	7:10:49 PM	Helium MFC set to  0.000000
8/8/2010	7:10:49 PM	H2 MFC set to  500.000000
8/8/2010	7:10:49 PM	BCl3 MFC set to  5.000000
8/8/2010	7:10:49 PM	PHl3 MFC set to  0.000000
8/8/2010	7:10:49 PM	SiCl4 MFC set to  50.000000
8/8/2010	7:10:49 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	7:10:49 PM	Tube furnace set to 1000
8/8/2010	7:25:49 PM	H2 valve closed
8/8/2010	7:25:49 PM	BCl3 valve closed
8/8/2010	7:25:49 PM	PH3 valve closed
8/8/2010	7:25:49 PM	SiCl4 pre valve closed
8/8/2010	7:25:49 PM	SiCl4 post valve closed
8/8/2010	7:25:49 PM	Main Vac valve closed
8/8/2010	7:25:49 PM	Bypass valve closed
8/8/2010	7:25:49 PM	Helium valve opened
8/8/2010	7:25:49 PM	Bubbler valve opened
8/8/2010	7:25:49 PM	Helium MFC set to  500.000000
8/8/2010	7:25:49 PM	H2 MFC set to  0.000000
8/8/2010	7:25:49 PM	BCl3 MFC set to  0.000000
8/8/2010	7:25:49 PM	PHl3 MFC set to  0.000000
8/8/2010	7:25:49 PM	SiCl4 MFC set to  0.000000
8/8/2010	7:25:49 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	7:25:49 PM	Tube furnace set to 0
8/8/2010	7:45:49 PM	Helium valve closed
8/8/2010	7:45:49 PM	H2 valve closed
8/8/2010	7:45:49 PM	BCl3 valve closed
8/8/2010	7:45:49 PM	PH3 valve closed
8/8/2010	7:45:49 PM	SiCl4 pre valve closed
8/8/2010	7:45:49 PM	SiCl4 post valve closed
8/8/2010	7:45:49 PM	Main Vac valve closed
8/8/2010	7:45:49 PM	Bypass valve closed
8/8/2010	7:45:49 PM	Bubbler valve closed
8/8/2010	7:45:49 PM	Helium MFC set to  0.000000
8/8/2010	7:45:50 PM	H2 MFC set to  0.000000
8/8/2010	7:45:50 PM	BCl3 MFC set to  0.000000
8/8/2010	7:45:50 PM	PHl3 MFC set to  0.000000
8/8/2010	7:45:50 PM	SiCl4 MFC set to  0.000000
8/8/2010	7:45:50 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	7:45:50 PM	Tube furnace set to 0
8/8/2010	7:45:50 PM	Run finished at 7:45 PM
8/8/2010	7:50:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2010	7:50:40 PM	Recipe started at 7:50 PM
8/8/2010	7:50:40 PM	H2 valve closed
8/8/2010	7:50:40 PM	BCl3 valve closed
8/8/2010	7:50:40 PM	PH3 valve closed
8/8/2010	7:50:40 PM	SiCl4 pre valve closed
8/8/2010	7:50:40 PM	SiCl4 post valve closed
8/8/2010	7:50:40 PM	Main Vac valve closed
8/8/2010	7:50:40 PM	Bypass valve closed
8/8/2010	7:50:40 PM	Bubbler valve closed
8/8/2010	7:50:40 PM	Helium valve opened
8/8/2010	7:50:40 PM	Helium MFC set to  500.000000
8/8/2010	7:50:40 PM	H2 MFC set to  0.000000
8/8/2010	7:50:40 PM	BCl3 MFC set to  0.000000
8/8/2010	7:50:40 PM	PHl3 MFC set to  0.000000
8/8/2010	7:50:40 PM	SiCl4 MFC set to  0.000000
8/8/2010	7:50:40 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	7:50:40 PM	Tube furnace set to 0
8/8/2010	7:50:41 PM	Helium valve closed
8/8/2010	7:50:41 PM	H2 valve closed
8/8/2010	7:50:41 PM	BCl3 valve closed
8/8/2010	7:50:42 PM	PH3 valve closed
8/8/2010	7:50:42 PM	SiCl4 pre valve closed
8/8/2010	7:50:42 PM	SiCl4 post valve closed
8/8/2010	7:50:42 PM	Main Vac valve closed
8/8/2010	7:50:42 PM	Bypass valve closed
8/8/2010	7:50:42 PM	Bubbler valve closed
8/8/2010	7:50:42 PM	Helium MFC set to  0.000000
8/8/2010	7:50:42 PM	H2 MFC set to  0.000000
8/8/2010	7:50:42 PM	BCl3 MFC set to  0.000000
8/8/2010	7:50:42 PM	PHl3 MFC set to  0.000000
8/8/2010	7:50:42 PM	SiCl4 MFC set to  0.000000
8/8/2010	7:50:42 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	7:50:42 PM	Tube furnace set to 0
8/8/2010	7:50:42 PM	Run finished at 7:50 PM
8/8/2010	7:50:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2010	8:01:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2010	8:01:27 PM	Recipe started at 8:01 PM
8/8/2010	8:01:27 PM	Helium valve closed
8/8/2010	8:01:27 PM	H2 valve closed
8/8/2010	8:01:27 PM	BCl3 valve closed
8/8/2010	8:01:27 PM	PH3 valve closed
8/8/2010	8:01:27 PM	SiCl4 pre valve closed
8/8/2010	8:01:27 PM	SiCl4 post valve closed
8/8/2010	8:01:27 PM	Main Vac valve closed
8/8/2010	8:01:27 PM	Bubbler valve closed
8/8/2010	8:01:27 PM	Bypass valve opened
8/8/2010	8:01:27 PM	Helium MFC set to  0.000000
8/8/2010	8:01:27 PM	H2 MFC set to  0.000000
8/8/2010	8:01:27 PM	BCl3 MFC set to  0.000000
8/8/2010	8:01:27 PM	PHl3 MFC set to  0.000000
8/8/2010	8:01:27 PM	SiCl4 MFC set to  0.000000
8/8/2010	8:01:27 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	8:01:27 PM	Tube furnace set to 0
8/8/2010	8:02:06 PM	Helium valve closed
8/8/2010	8:02:06 PM	H2 valve closed
8/8/2010	8:02:06 PM	BCl3 valve closed
8/8/2010	8:02:06 PM	PH3 valve closed
8/8/2010	8:02:06 PM	SiCl4 pre valve closed
8/8/2010	8:02:06 PM	SiCl4 post valve closed
8/8/2010	8:02:06 PM	Bubbler valve closed
8/8/2010	8:02:06 PM	Main Vac valve opened
8/8/2010	8:02:06 PM	Bypass valve opened
8/8/2010	8:02:06 PM	Helium MFC set to  0.000000
8/8/2010	8:02:06 PM	H2 MFC set to  0.000000
8/8/2010	8:02:06 PM	BCl3 MFC set to  0.000000
8/8/2010	8:02:06 PM	PHl3 MFC set to  0.000000
8/8/2010	8:02:06 PM	SiCl4 MFC set to  0.000000
8/8/2010	8:02:06 PM	Bypass solenoid MFC set to  0.000000
8/8/2010	8:02:06 PM	Tube furnace set to 0
8/8/2010	8:02:06 PM	Run finished at 8:02 PM
8/8/2010	8:02:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
